EE 205 Introduction to MEMS



Micro electro mechanical systems (MEMS), devices and technologies. Micro-machining and microfabrication techniques, including planar thin- film processing, silicon etching, wafer bonding, photolithography, deposition and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive and thermal sensors/actuators and applications. Computer- aided design for MEMS layout, fabrication and analysis.
Course period09/1/09 → …
Course level200