EE 304 Integrated Microsystems



Review of interface electronics for sense and drive and their influence on device performance, interface standards, MEMS and circuit noise sources, packaging and assembly techniques, testing and calibration approaches and communication in integrated microsystems.Applications, including RF MEMS, optical MEMS, bioMEMS and microfluidics. Design project using CAD and report preparation.
Course period09/3/11 → …
Course level300