Equipments Details
Description
Ion beam etching together with chemical etching using Argon ion beam milling with chlorine and fluorine gas inlet.
Model: Oxford Instruments IonFab 300 Plus
Model: Oxford Instruments IonFab 300 Plus
Details
Name | Chemical Assisted Ion Beam Etch |
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Acquisition date | 04/1/10 |
Manufacturers | Oxford Instruments Group Plc |
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