Chemical Assisted Ion Beam Etch

  • Gheorghe Iordache (Manager)

Equipment/facility: Equipment

  • LocationShow on map

    King Abdullah University of Science and Technology Thuwal 23955

    Saudi Arabia

Equipments Details

Description

Ion beam etching together with chemical etching using Argon ion beam milling with chlorine and fluorine gas inlet.
Model: Oxford Instruments IonFab 300 Plus

Details

NameChemical Assisted Ion Beam Etch
Acquisition date04/1/10
ManufacturersOxford Instruments Group Plc

Fingerprint

Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.