@article{41c4973769fb4155bd1d11556fd4e0b8,
title = "1000-Pixels per Inch Transistor Arrays Using Multi-Level Imprint Lithography",
abstract = "Sub-micrometer thin-film transistors (TFTs) are realized using multi-level imprint lithography. Amorphous indium gallium zinc oxide (α-IGZO) TFTs with channel lengths as small as 0.7μm, field-effect mobility of 10 cm2V-1s-1 and on/off ratio of circa 107 were integrated into a 1000-pixels per inch (ppi) TFT backplane array. The reduction of the number of patterning steps and the inherent self-registration of the most critical transistor layers on top of each other offer a cost-effective high-throughput fabrication route for high-resolution TFT arrays.",
author = "Tamer Dogan and {de Riet}, Joris and Thijs Bel and Ilias Katsouras and Lukasz Witczak and Kronemeijer, {Auke Jisk} and Janssen, {Rene A. J.} and Gelinck, {Gerwin H.}",
note = "KAUST Repository Item: Exported on 2021-02-11 Acknowledged KAUST grant number(s): OSR-CRG2018-3783 Acknowledgements: This work was supported in part by the European Regional Development Fund through the Flexlines Project through the Interreg V-Program Flanders-The Netherlands, a Cross-Border Cooperation Program, in part by the Province of Noord-Brabant, The Netherlands, and in part by the King Abdullah University of Science and Technology (KAUST) Office for Sponsored Research (OSR) under Award OSR-CRG2018-3783. This publication acknowledges KAUST support, but has no KAUST affiliated authors.",
year = "2020",
month = aug,
doi = "10.1109/led.2020.3006343",
language = "English (US)",
volume = "41",
pages = "1217--1220",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers",
number = "8",
}