@inproceedings{197a16fdaf7a4ad491a4a6efdea37198,
title = "A 3D-printed Cantilever Beam Within a Semi-enclosed Cylinder Cavity For Differential Pressure Sensing",
abstract = "In this study, a cantilever-based pressure sensor is fabricated that moves within a cylinder cavity by using a fused deposition modeling (FDM)-based three-dimensional (3D) printer. The semi-enclosed cylinder cavity frame is generated through layer-by-layer additive manufacturing to release the suspended cantilever structure by the FDM-type 3D printer. The displacement of the sensing membrane induced by the pressure difference on both sides of the membrane results in capacitance variations, which can be read out electrostatically. Furthermore, the results also highlight the simplicity and cost-effectiveness of the manufacturing process for this portable pressure sensor.",
keywords = "3D-printing, Differential sensing, electrostatic, Pressure sensor",
author = "Xuecui Xou and Dhiya Belkadi and Kim, {Min Sung} and Salama, {Khaled Nabil} and Hussain, {Muhammad Mustafa}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 8th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2024 ; Conference date: 03-03-2024 Through 06-03-2024",
year = "2024",
doi = "10.1109/EDTM58488.2024.10512071",
language = "English (US)",
series = "IEEE Electron Devices Technology and Manufacturing Conference: Strengthening the Globalization in Semiconductors, EDTM 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IEEE Electron Devices Technology and Manufacturing Conference",
address = "United States",
}