A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT)

U. Izhar*, B. S. Ooi, S. Tatic-Lucic

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.

Original languageEnglish (US)
Title of host publication2010 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsDavid J. Monk, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages230-233
Number of pages4
ISBN (Electronic)0964002485, 9780964002487
DOIs
StatePublished - 2010
Event2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 6 2010Jun 10 2010

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period06/6/1006/10/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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