A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

Joanna M. Nassar; Galo T. Sevilla; Seneca J. Velling; Marlon Diaz; Muhammad Mustafa Hussain

doi:10.1109/IEDM.2016.7838448

A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

Joanna M. Nassar, Galo T. Sevilla, Seneca J. Velling, Marlon Diaz, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.

Original language	English (US)
Title of host publication	2016 IEEE International Electron Devices Meeting (IEDM)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	18.6.1-18.6.4
Number of pages	1
ISBN (Print)	9781509039029
DOIs	https://doi.org/10.1109/IEDM.2016.7838448
State	Published - Feb 7 2017

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10.1109/IEDM.2016.7838448

https://repository.kaust.edu.sa/bitstream/10754/622930/1/2016%2008%2009%20JMN%20IEDM%20v3.pdf

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Nassar, J. M., Sevilla, G. T., Velling, S. J., Diaz, M., & Hussain, M. M. (2017). A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. In 2016 IEEE International Electron Devices Meeting (IEDM) (pp. 18.6.1-18.6.4). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/IEDM.2016.7838448

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title = "A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications",

abstract = "We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.",

author = "Nassar, {Joanna M.} and Sevilla, {Galo T.} and Velling, {Seneca J.} and Marlon Diaz and Hussain, {Muhammad Mustafa}",

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Nassar, JM, Sevilla, GT, Velling, SJ, Diaz, M & Hussain, MM 2017, A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. in 2016 IEEE International Electron Devices Meeting (IEDM). Institute of Electrical and Electronics Engineers (IEEE), pp. 18.6.1-18.6.4. https://doi.org/10.1109/IEDM.2016.7838448

A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. / Nassar, Joanna M.; Sevilla, Galo T.; Velling, Seneca J. et al.
2016 IEEE International Electron Devices Meeting (IEDM). Institute of Electrical and Electronics Engineers (IEEE), 2017. p. 18.6.1-18.6.4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

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