A Highly Sensitive Electromechanical Small Current Ammeter

Xuecui Zou*, Usman Yaqoob, Khaled Salama, Hossein Fariborzi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a novel approach for highly sensitive and resolution-enhanced detection and monitoring of minute current variations using a single clamped-clamped microbeam resonator. The resonator's stiffness perturbations induced by the input current variation result in a frequency shift. The proposed resonant electric sensor operates close to the buckling region, revealing drastic changes in the deflection profile, which can be exploited for sensitive and high-resolution ammeter applications. We establish and verify the detailed sensitivity enhancement induced by the buckling effects with experimental results. The proposed resonant electric sensor exhibits an enhanced sensitivity of 85Hz/μA, requires a small area, and has a compact structure suitable for portable electronics.

Original languageEnglish (US)
Title of host publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1715-1718
Number of pages4
ISBN (Electronic)9784886864352
StatePublished - 2023
Event22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan
Duration: Jun 25 2023Jun 29 2023

Publication series

Name2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/TerritoryJapan
CityKyoto
Period06/25/2306/29/23

Keywords

  • Buckling effects
  • Electrothermal modulation
  • Resonant electric sensor
  • Sensitivity enhancement

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Control and Optimization
  • Instrumentation

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