A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor

P.M. Ribeiro; A. Alfhadel; Jürgen Kosel; F. Franco; S. Cardoso; A. Bernardino; L. Jamone; J. Santos-Victor

doi:10.1109/INTMAG.2017.8007852

A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor

P.M. Ribeiro, A. Alfhadel, Jürgen Kosel, F. Franco, S. Cardoso, A. Bernardino, L. Jamone, J. Santos-Victor

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

The detection of low-magnitude forces (under 1mN) is essential in applications that require either a very high sensitivity and resolution acquisition (e.g. detection of microfluidic flows) or very high reliability and control (e.g. biomedical or humanoid robotics). In this work, we present a bio-inspired ciliary force sensor consisting in an array of magnetized, flexible quasi-elastic pillars deposited over a magnetoresistive GMR sensor. The GMR sensor stack (Ta 10/NiFe 28/CoFe 25/Cu 26/CoFe 23/MnIr 80/Ta 30, thickness in Å) was deposited at INESC-MN by ion beam and patterned in series array of 120 elements with 60 x 3 μm2, over a total area of 3 x 3 mm2, resulting in a sensitivity of 22.5 Ω Oe-1.

Original language	English (US)
Title of host publication	2017 IEEE International Magnetics Conference (INTERMAG)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
ISBN (Print)	9781538610862
DOIs	https://doi.org/10.1109/INTMAG.2017.8007852
State	Published - Apr 2017

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10.1109/INTMAG.2017.8007852

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Ribeiro, P. M., Alfhadel, A., Kosel, J., Franco, F., Cardoso, S., Bernardino, A., Jamone, L., & Santos-Victor, J. (2017). A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor. In 2017 IEEE International Magnetics Conference (INTERMAG) Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/INTMAG.2017.8007852

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title = "A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor",

abstract = "The detection of low-magnitude forces (under 1mN) is essential in applications that require either a very high sensitivity and resolution acquisition (e.g. detection of microfluidic flows) or very high reliability and control (e.g. biomedical or humanoid robotics). In this work, we present a bio-inspired ciliary force sensor consisting in an array of magnetized, flexible quasi-elastic pillars deposited over a magnetoresistive GMR sensor. The GMR sensor stack (Ta 10/NiFe 28/CoFe 25/Cu 26/CoFe 23/MnIr 80/Ta 30, thickness in {\AA}) was deposited at INESC-MN by ion beam and patterned in series array of 120 elements with 60 x 3 μm2, over a total area of 3 x 3 mm2, resulting in a sensitivity of 22.5 Ω Oe-1.",

author = "P.M. Ribeiro and A. Alfhadel and J{\"u}rgen Kosel and F. Franco and S. Cardoso and A. Bernardino and L. Jamone and J. Santos-Victor",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2017",

month = apr,

doi = "10.1109/INTMAG.2017.8007852",

language = "English (US)",

isbn = "9781538610862",

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Ribeiro, PM, Alfhadel, A, Kosel, J, Franco, F, Cardoso, S, Bernardino, A, Jamone, L & Santos-Victor, J 2017, A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor. in 2017 IEEE International Magnetics Conference (INTERMAG). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/INTMAG.2017.8007852

A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor. / Ribeiro, P.M.; Alfhadel, A.; Kosel, Jürgen et al.
2017 IEEE International Magnetics Conference (INTERMAG). Institute of Electrical and Electronics Engineers (IEEE), 2017.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor

AU - Ribeiro, P.M.

AU - Alfhadel, A.

AU - Kosel, Jürgen

AU - Franco, F.

AU - Cardoso, S.

AU - Bernardino, A.

AU - Jamone, L.

AU - Santos-Victor, J.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2017/4

Y1 - 2017/4

N2 - The detection of low-magnitude forces (under 1mN) is essential in applications that require either a very high sensitivity and resolution acquisition (e.g. detection of microfluidic flows) or very high reliability and control (e.g. biomedical or humanoid robotics). In this work, we present a bio-inspired ciliary force sensor consisting in an array of magnetized, flexible quasi-elastic pillars deposited over a magnetoresistive GMR sensor. The GMR sensor stack (Ta 10/NiFe 28/CoFe 25/Cu 26/CoFe 23/MnIr 80/Ta 30, thickness in Å) was deposited at INESC-MN by ion beam and patterned in series array of 120 elements with 60 x 3 μm2, over a total area of 3 x 3 mm2, resulting in a sensitivity of 22.5 Ω Oe-1.

AB - The detection of low-magnitude forces (under 1mN) is essential in applications that require either a very high sensitivity and resolution acquisition (e.g. detection of microfluidic flows) or very high reliability and control (e.g. biomedical or humanoid robotics). In this work, we present a bio-inspired ciliary force sensor consisting in an array of magnetized, flexible quasi-elastic pillars deposited over a magnetoresistive GMR sensor. The GMR sensor stack (Ta 10/NiFe 28/CoFe 25/Cu 26/CoFe 23/MnIr 80/Ta 30, thickness in Å) was deposited at INESC-MN by ion beam and patterned in series array of 120 elements with 60 x 3 μm2, over a total area of 3 x 3 mm2, resulting in a sensitivity of 22.5 Ω Oe-1.

UR - http://hdl.handle.net/10754/656012

UR - https://ieeexplore.ieee.org/document/8007852/

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U2 - 10.1109/INTMAG.2017.8007852

DO - 10.1109/INTMAG.2017.8007852

M3 - Conference contribution

SN - 9781538610862

BT - 2017 IEEE International Magnetics Conference (INTERMAG)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor

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