A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

Adam M. Bouchaala; Mohammad I. Younis

doi:10.1007/978-3-319-17527-0_50

A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

Adam M. Bouchaala, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

Original language	English (US)
Title of host publication	Design and Modeling of Mechanical Systems - II
Publisher	Springer Nature
Pages	501-512
Number of pages	12
ISBN (Print)	9783319175263
DOIs	https://doi.org/10.1007/978-3-319-17527-0_50
State	Published - 2015

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Library and Information Sciences

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10.1007/978-3-319-17527-0_50

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@inproceedings{1604110029904207970f65f9643c1422,

title = "A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection",

abstract = "We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. {\textcopyright} Springer International Publishing Switzerland 2015.",

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AU - Bouchaala, Adam M.

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2015

Y1 - 2015

N2 - We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

AB - We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

UR - http://hdl.handle.net/10754/565016

UR - http://link.springer.com/10.1007/978-3-319-17527-0_50

UR - http://www.scopus.com/inward/record.url?scp=84926294611&partnerID=8YFLogxK

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DO - 10.1007/978-3-319-17527-0_50

M3 - Conference contribution

SN - 9783319175263

SP - 501

EP - 512

BT - Design and Modeling of Mechanical Systems - II

PB - Springer Nature

ER -

A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

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