TY - JOUR
T1 - A multi-axis electrothermal micromirror for a miniaturized OCT system
AU - Izhar, U.
AU - Izhar, A.B.
AU - Tatic-Lucic, S.
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: We are grateful to Professor Boon S. Ooi from division of physical science and engineering, King Abdullah University of science and technology, Saudi Arabia for his advice and support. This work was supported by PITA (Pennsylvania Infrastructure Technology Alliance), PIT-743-07 and the fabrication was performed in CNF (Cornell Nanoscale Science and Technology Facility) at Cornell University.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.
PY - 2011/6
Y1 - 2011/6
N2 - We report on the development of a low power thermally actuated bi-axis SOI micromirror that is capable of performing angular and vertical scans for optical coherence tomography (OCT) applications. The device consists of a mirror with an aluminum coating over a 3 μm thick single crystal silicon base, aluminum/polysilicon electrothermal actuators with embedded heaters and polysilicon flexural connectors. In scanning mode, this mirror can satisfy our target specification of 5° angle at the low power of 1.7 mW with a temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. Furthermore, a maximum angle of 32° has been achieved at 12 mW. In piston mode, it can reach vertical displacements of up to 131 μm at 12 mW with the temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. The scanning speed for the mirror has been measured and the time response of the mirror is found to be 100 ms. The curvature of the mirror is found to be 2.4 mm ± 0.26 mm with a roughness of 100 nm ± 20 nm. Due to low driving power and moderate temperatures developed during its operation, this device can potentially be integrated with broadband light source, photodetector and interferometery system, to form a fully integrated OCT system on GaAs substrate. © 2011 Elsevier B.V. All rights reserved.
AB - We report on the development of a low power thermally actuated bi-axis SOI micromirror that is capable of performing angular and vertical scans for optical coherence tomography (OCT) applications. The device consists of a mirror with an aluminum coating over a 3 μm thick single crystal silicon base, aluminum/polysilicon electrothermal actuators with embedded heaters and polysilicon flexural connectors. In scanning mode, this mirror can satisfy our target specification of 5° angle at the low power of 1.7 mW with a temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. Furthermore, a maximum angle of 32° has been achieved at 12 mW. In piston mode, it can reach vertical displacements of up to 131 μm at 12 mW with the temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. The scanning speed for the mirror has been measured and the time response of the mirror is found to be 100 ms. The curvature of the mirror is found to be 2.4 mm ± 0.26 mm with a roughness of 100 nm ± 20 nm. Due to low driving power and moderate temperatures developed during its operation, this device can potentially be integrated with broadband light source, photodetector and interferometery system, to form a fully integrated OCT system on GaAs substrate. © 2011 Elsevier B.V. All rights reserved.
UR - http://hdl.handle.net/10754/597318
UR - https://linkinghub.elsevier.com/retrieve/pii/S0924424711002342
UR - http://www.scopus.com/inward/record.url?scp=79955899563&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2011.04.003
DO - 10.1016/j.sna.2011.04.003
M3 - Article
SN - 0924-4247
VL - 167
SP - 152
EP - 161
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2
ER -