A multi-axis electrothermal micromirror for a miniaturized OCT system

Engineering

• Polysilicon 100%
• Temperature Increase 100%
• Micromirrors 100%
• Photodetector 50%
• Scanning Speed 50%
• Moderate Temperature 50%
• Silicon Single Crystal 50%
• Gaas Substrate 50%
• Satisfies 50%
• Broadband Light Source 50%
• Response Time 50%

Keyphrases

• Maximum Angle 50%
• Piston Mode 50%
• Driving Power 50%
• Aluminum Coating 50%