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A multiscale simulation approach for the MOCVD of GaN using a single-molecule precursor in a vertical stagnation flow reactor
Merim Mukinovic*, Gunther Brenner, Jayaprakash Khanderi, Stephan Spöllmann, Roland A. Fischer, Maxim Tafipolsky, Thomas Cadenbach, Rochus Schmid
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
8
Scopus
citations