A Nanoelectromechanical Resonator-Based Flash Style Analog to Digital Converter

Xuecui Zou, Sally Ahmed, Syed Kazmi, Pedro M. F. J. Da Costa, Mohammad I. Younis, Hossein Fariborzi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations


In this work, the design of a flash-style nanoelectromechanical resonator-based analog to digital converter (ADC) is presented. The operation of the proposed ADC depends on tuning the beam resonance frequency by the sampled voltage, using the electrostatic softening effect. In this paper, experimental results are demonstrated for a 3-bit ADC. The proposed solution reduces design complexity by 20 times and reduces energy consumption by one order of magnitude compared to conventional complementary metal-oxide-semiconductor (CMOS) counterpart. While the measured sampling rate is 8 kS/s, resonators with GHz resonance frequency can increase the sampling rate to MHz and above, making this technology a viable option for medium speed, ultra-low power IoT and sensor applications.
Original languageEnglish (US)
Title of host publication2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Number of pages4
ISBN (Print)9781728135809
StatePublished - Apr 7 2020


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