A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High-k, and Layered Dielectrics

Felix Palumbo, Chao Wen, Salvatore Lombardo, Sebastian Pazos, Fernando Aguirre, Moshe Eizenberg, Fei Hui, Mario Lanza

Research output: Contribution to journalArticlepeer-review

163 Scopus citations

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