@inproceedings{375f052b875841bcb771a637df786476,
title = "A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel",
abstract = "A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.",
keywords = "Casting, Coatings, Fabrication, Microchannel, Microvalves, Polymer films, Temperature sensors, Thin film sensors, Valves, Viscosity",
author = "S. Mutlu and Cong Yu and F. Svec and Mastrangelo, {C. H.} and Fr{\'e}chet, {J. M.J.} and Gianchandani, {Y. B.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215595",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "802--805",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}