A Water-Castable, Water-Developable Chemically Amplified Negative-Tone Resist

Qinghuang Lin, Thomas Steinhäusler, Logan Simpson, Michelle Wilder, David R. Medeiros, C. Grant Willson*, Jennifer Havard, Jean M.J. Fréchet

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

45 Scopus citations

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Keyphrases

Engineering

Chemistry

Earth and Planetary Sciences

Material Science

Physics