Additive fabrication of SiO₂-based micro-optics with lag-free depth and reduced roughness

Engineering

• Optical Element 100%
• Optical Systems 33%
• Fabrication Method 33%
• Feature Size 33%
• Microstructure 16%
• Aspect Ratio 16%
• Compact Size 16%
• Laser Beam 16%
• Beam Shaping 16%
• Vapor Deposition Method 16%
• Deposited Material 16%
• Smallest Feature 16%
• Demonstrates 16%
• Roughness Ratio 16%
• Vapor Deposition 16%
• Chemical Vapor Deposition 16%
• Mass Production 16%
• Imaging Systems 16%

Material Science

• Reactive Ion Etching 100%
• Plasma-Enhanced Chemical Vapor Deposition 50%
• Surface Roughness 50%
• Optical Device 50%

Keyphrases

• High Design Flexibility 16%