An electrically actuated microbeam-based mems device: Experimental and theoretical investigation

Keyphrases

• Electrically Actuated 100%
• Electrodynamics 100%
• MEMS Devices 100%
• Microbeam 100%
• Micro-electro-mechanical Systems 66%
• Increasing Value 66%
• Nonlinear Dynamics 33%
• Natural Frequency 33%
• Non-resonant 33%
• Numerical Simulation 33%
• Nonlinear Behavior 33%
• Clamped-clamped Microbeam 33%
• Reduced Order Model 33%
• Experimental Response 33%
• Dynamic Behavior 33%
• Computational Efficiency 33%
• Galerkin Method 33%
• Single-degree-of-freedom System 33%
• Frequency Sweep 33%
• Forcing Term 33%
• Nonlinear Features 33%
• Parametric Identification 33%
• Frequency Values 33%
• Electric Force 33%

Engineering

• Theoretical Investigation 100%
• Mem Device 100%
• Experimental Investigation 100%
• Degree of Freedom 50%
• Computer Simulation 50%
• Single Degree 50%
• Sweep Frequency 50%
• Data Show 50%
• Computational Efficiency 50%
• Reduced Order Model 50%
• Dynamic Behavior 50%
• Experimental Response 50%
• Nonlinear Behavior 50%
• Nonlinear Feature 50%
• Parametric Identification 50%
• Natural Frequency 50%