An imperfect microbeam electrically actuated: Experimental investigation and parameter identification

Keyphrases

• Frequency Response 100%
• Electrically Actuated 100%
• Imperfect Microbeam 100%
• Microbeam 100%
• Parameter Identification 100%
• Micro-electro-mechanical Systems 66%
• Natural Frequency 66%
• Electrodynamics 66%
• Experimental Frequency 66%
• Nonlinear Dynamics 33%
• Polysilicon 33%
• Response Diagrams 33%
• Dynamic Pull-in 33%
• Imperfection 33%
• Increasing Value 33%
• Microfabrication Process 33%
• Clamped-clamped 33%
• Mechanical Model 33%
• Complex Dynamics 33%
• Parametric Analysis 33%
• Laser Doppler Vibrometer 33%
• Experimental Testing 33%
• Backward Sweep 33%
• Forward Sweep 33%

Engineering

• Experimental Investigation 100%
• Experimental Parameter 100%
• Frequency Response 100%
• Natural Frequency 66%
• Microfabrication 33%
• Polysilicon 33%
• Theoretical Investigation 33%
• Mechanical Model 33%
• Parametric Analysis 33%

Material Science

• Microfabrication 100%