An integrated photonic MEMS switch system with fast switching speed and low power demand

E. H. Khoo; J. Li; H. Cai; D. Pinjala; A. Q. Liu

doi:10.1109/SENSOR.2007.4300417

An integrated photonic MEMS switch system with fast switching speed and low power demand

E. H. Khoo, J. Li, H. Cai, D. Pinjala, A. Q. Liu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ∼ 20 μs. a higher device density with an overall system size of ∼ 10 μm × 10 μm compared with other MEMS switches.

Original language	English (US)
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1449-1452
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300417
State	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	06/10/07 → 06/14/07

Keywords

Elliptical
Micro-mirror
Microelectromechanical system (MEMS)
Photonic crystal
Switch

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300417

Cite this

Khoo, E. H., Li, J., Cai, H., Pinjala, D., & Liu, A. Q. (2007). An integrated photonic MEMS switch system with fast switching speed and low power demand. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1449-1452). Article 4300417 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300417

Khoo, E. H. ; Li, J. ; Cai, H. et al. / An integrated photonic MEMS switch system with fast switching speed and low power demand. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 1449-1452 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

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title = "An integrated photonic MEMS switch system with fast switching speed and low power demand",

abstract = "This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ∼ 20 μs. a higher device density with an overall system size of ∼ 10 μm × 10 μm compared with other MEMS switches.",

keywords = "Elliptical, Micro-mirror, Microelectromechanical system (MEMS), Photonic crystal, Switch",

author = "Khoo, {E. H.} and J. Li and H. Cai and D. Pinjala and Liu, {A. Q.}",

year = "2007",

doi = "10.1109/SENSOR.2007.4300417",

language = "English (US)",

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series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "1449--1452",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

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Khoo, EH, Li, J, Cai, H, Pinjala, D & Liu, AQ 2007, An integrated photonic MEMS switch system with fast switching speed and low power demand. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300417, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1449-1452, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 06/10/07. https://doi.org/10.1109/SENSOR.2007.4300417

An integrated photonic MEMS switch system with fast switching speed and low power demand. / Khoo, E. H.; Li, J.; Cai, H. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1449-1452 4300417 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An integrated photonic MEMS switch system with fast switching speed and low power demand

AU - Khoo, E. H.

AU - Li, J.

AU - Cai, H.

AU - Pinjala, D.

AU - Liu, A. Q.

PY - 2007

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N2 - This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ∼ 20 μs. a higher device density with an overall system size of ∼ 10 μm × 10 μm compared with other MEMS switches.

AB - This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ∼ 20 μs. a higher device density with an overall system size of ∼ 10 μm × 10 μm compared with other MEMS switches.

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KW - Micro-mirror

KW - Microelectromechanical system (MEMS)

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T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

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BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07

Y2 - 10 June 2007 through 14 June 2007

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Khoo EH, Li J, Cai H, Pinjala D, Liu AQ. An integrated photonic MEMS switch system with fast switching speed and low power demand. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1449-1452. 4300417. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300417

An integrated photonic MEMS switch system with fast switching speed and low power demand

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Keywords

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