Annealing effect on the performance of sputtering deposited Metglas thin films

Keyphrases

• Metglas 100%
• Microscale Sensor 50%
• Ferromagnetic Materials 50%
• Annealing Process 50%
• Internal Stress 50%
• Sensor-based 50%
• Biological Species 50%
• Vacuum Condition 50%
• MEMS Technology 50%
• As-deposited 50%

Engineering

• Thin Films 100%
• Annealing Effect 100%
• Chemical Specie 50%
• Microscale 50%
• Biological Specie 50%
• Annealing Process 50%
• Resonant Frequency 50%
• Internal Stress 50%

Material Science

• Metglas 100%
• Thin Films 100%
• Ferromagnetic Material 50%