Breath figures (BFs) are patterns of liquid droplets that usually form upon condensation on a cold surface. Earlier work has shown that BFs can be used to produce continuous films of porous honeycomb-structured patterns on various types of materials, paving the path to a number of important applications such as the manufacturing of highly ordered nano- and micron-sized templates, micro lenses, and superhydrophobic coatings. It is worth noting, however, that few new findings have been reported in this area in recent years, limiting pursuits of novel architectures and key applications. In this report, an alternative method is described by which arrays of hollow silica half-nanospheres can be produced via BF templates. In the present method, a chemical vapor deposition (CVD) protocol performed while the BF is formed on a glass substrate yields a nanostructured pattern of silica half-spheres, which size (100-700 nm) and density across the glass surface vary with substrate modification and with the relative rates of water condensation and hydrolysis from silica precursors (a process carried out at room temperature). This method of forming arrays of hollow half-nanospheres via the BF approach may be applicable to various other oxides and a broad range of substrates including large-area flexible plastics. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.