Artificial-Intelligence Empowered Universal Metrology Optical Camera

Arturo Burguete-Lopez*, Maksim Makarenko, Qizhou Wang, Fedor Getman, Andrea Fratalocchi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We introduce a metrology platform that employs artificial intelligence in hardware through optical metasurfaces. We experimentally demonstrate the measurement of thin film thickness and refractive index maps with nanometer accuracy using this platform.

Original languageEnglish (US)
Title of host publication2023 Conference on Lasers and Electro-Optics, CLEO 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781957171258
StatePublished - 2023
Event2023 Conference on Lasers and Electro-Optics, CLEO 2023 - San Jose, United States
Duration: May 7 2023May 12 2023

Publication series

Name2023 Conference on Lasers and Electro-Optics, CLEO 2023

Conference

Conference2023 Conference on Lasers and Electro-Optics, CLEO 2023
Country/TerritoryUnited States
CitySan Jose
Period05/7/2305/12/23

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Science Applications
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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