@inproceedings{d11b10b3564a488a9a939c7734ba624b,
title = "Artificial-Intelligence Empowered Universal Metrology Optical Camera",
abstract = "We introduce a metrology platform that employs artificial intelligence in hardware through optical metasurfaces. We experimentally demonstrate the measurement of thin film thickness and refractive index maps with nanometer accuracy using this platform.",
author = "Arturo Burguete-Lopez and Maksim Makarenko and Qizhou Wang and Fedor Getman and Andrea Fratalocchi",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023.; 2023 Conference on Lasers and Electro-Optics, CLEO 2023 ; Conference date: 07-05-2023 Through 12-05-2023",
year = "2023",
language = "English (US)",
series = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",
address = "United States",
}