BEOL test chip for rapid technology and process integration debugging

Y. C. Ee, J. B. Tan, B. C. Zhang, F. Zhang, Y. L. Yao, P. K. Tan, C. S. Chee, C. K. Koo, X. B. Wang, D. K. Sohn, T. Fu, L. C. Hsia, A. Inani, N. Akiya, L. Yuan, A. Agarwal

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint

Dive into the research topics of 'BEOL test chip for rapid technology and process integration debugging'. Together they form a unique fingerprint.

Keyphrases

Engineering