TY - JOUR
T1 - Can a recipe for the growth of single-layer graphene on copper be used in different chemical vapor deposition reactors?
AU - Hakami, Marim A.
AU - Deokar, Geetanjali Baliram
AU - Smajic, Jasmin
AU - Batra, Nitinkumar
AU - Costa, Pedro Miguel Ferreira Joaquim
N1 - KAUST Repository Item: Exported on 2021-04-16
PY - 2021/4/13
Y1 - 2021/4/13
N2 - In the last decade, catalytic chemical vapor deposition (CVD) has been intensively explored for the growth of single-layer graphene (SLG). Despite the scattering of guidelines and procedures, variables such as the surface texture/chemistry of catalyst metal foils, carbon feedstock, and growth process parameters have been well-scrutinized. Still, questions remain on how best to standardize the growth procedure. The possible correlation of recipes between different CVD setups is an example. Here, two thermal CVD reactors were explored to grow graphene on Cu foil. The design of these setups was entirely distinct, one being a "showerhead" cold-wall type, whereas the other represented the popular "tubular" hot-wall type. Upon standardizing the Cu foil surface, it was possible to develop a recipe for cm 2 -scale SLG growth that differed only on the carrier gas flow rate used in the two reactors.
AB - In the last decade, catalytic chemical vapor deposition (CVD) has been intensively explored for the growth of single-layer graphene (SLG). Despite the scattering of guidelines and procedures, variables such as the surface texture/chemistry of catalyst metal foils, carbon feedstock, and growth process parameters have been well-scrutinized. Still, questions remain on how best to standardize the growth procedure. The possible correlation of recipes between different CVD setups is an example. Here, two thermal CVD reactors were explored to grow graphene on Cu foil. The design of these setups was entirely distinct, one being a "showerhead" cold-wall type, whereas the other represented the popular "tubular" hot-wall type. Upon standardizing the Cu foil surface, it was possible to develop a recipe for cm 2 -scale SLG growth that differed only on the carrier gas flow rate used in the two reactors.
UR - http://hdl.handle.net/10754/668788
UR - https://onlinelibrary.wiley.com/doi/10.1002/asia.202100199
U2 - 10.1002/asia.202100199
DO - 10.1002/asia.202100199
M3 - Article
C2 - 33848403
SN - 1861-4728
JO - Chemistry, an Asian journal
JF - Chemistry, an Asian journal
ER -