Fingerprint
Dive into the research topics of 'CD control of sub-200 nm x-ray masks using an e-beam writer'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
CD control of sub-200 nm x-ray masks using an e-beam writer
E. Di Fabrizio*, L. Luciani, M. Baciocchi, L. Mastrogiacomo, R. Kumar, L. Scopa
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review