CD control of sub-200 nm x-ray masks using an e-beam writer

Enzo Di Fabrizio*, L. Luciani, M. Baciocchi, L. Mastrogiacomo, R. Kumar, L. Scopa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'CD control of sub-200 nm x-ray masks using an e-beam writer'. Together they form a unique fingerprint.

INIS

Engineering

Material Science