Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors

Keyphrases

• Electrochemical Impedance Spectroscopy 100%
• Iron Oxide 100%
• Alkali Doped 100%
• Doped TiO2 100%
• Humidity Sensor 100%
• Ceramic Thin Films 100%
• Porous Ceramics 100%
• Sol-gel Processing 100%
• Humidity 50%
• Humidity Sensitivity 50%
• Order of Magnitude 50%
• Porosity 50%
• Electrical Properties 50%
• Dip Coating 50%
• Sol-gel Method 50%
• Impedance Spectroscopy 50%
• Au Electrode 50%
• Charge Carriers 50%
• Conduction Mechanism 50%
• TiO2 Film 50%
• Doped Titania 50%
• Continuous Film 50%
• Humidity Sensing 50%
• Resistance to Change 50%
• Surface Protons 50%
• Comb-type 50%
• K-doped 50%
• Alkali Ions 50%
• Al2O3 Substrate 50%
• Metal Alkoxides 50%
• Titanium Film 50%

Material Science

• Humidity Sensor 100%
• Sol-Gel Processing 100%
• Titanium Dioxide 100%
• Novel Material 100%
• Thin Films 100%
• Dielectric Spectroscopy 66%
• Iron Oxide 66%
• Porous Ceramics 66%
• Sol-Gel 33%
• Al2O3 33%
• Charge Carrier 33%