CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges

Yongho Kim; Kwan Tae Kim; Min Suk Cha; Young Hoon Song; Seock Joon Kim

doi:10.1109/TPS.2005.848616

CF₄ decompositions using streamer- and glow-mode in dielectric barrier discharges

Yongho Kim^*, Kwan Tae Kim, Min Suk Cha, Young Hoon Song, Seock Joon Kim

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF₄) because the DBD has been successfully used for generating ozone (O₃) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF₄ decompositions was investigated and the optimum oxygen concentrations were found. We compared N₂-streamer, N₂-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF₄ removal. The results showed that the most efficient CF₄ removal was obtained in He-glow mode, while N₂-streamer and N₂-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF₄ removal efficiency compared to the normal N₂-streamer mode.

Original language	English (US)
Pages (from-to)	1041-1046
Number of pages	6
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	3
DOIs	https://doi.org/10.1109/TPS.2005.848616
State	Published - Jun 2005
Externally published	Yes

Keywords

CF decomposition
Dielectric barrier discharge
Glow
Perforated DBD
Streamer

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Access to Document

10.1109/TPS.2005.848616

Cite this

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title = "CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges",

abstract = "A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.",

keywords = "CF decomposition, Dielectric barrier discharge, Glow, Perforated DBD, Streamer",

author = "Yongho Kim and Kim, {Kwan Tae} and Cha, {Min Suk} and Song, {Young Hoon} and Kim, {Seock Joon}",

year = "2005",

month = jun,

doi = "10.1109/TPS.2005.848616",

language = "English (US)",

volume = "33",

pages = "1041--1046",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

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TY - JOUR

T1 - CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges

AU - Kim, Yongho

AU - Kim, Kwan Tae

AU - Cha, Min Suk

AU - Song, Young Hoon

AU - Kim, Seock Joon

PY - 2005/6

Y1 - 2005/6

N2 - A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.

AB - A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.

KW - CF decomposition

KW - Dielectric barrier discharge

KW - Glow

KW - Perforated DBD

KW - Streamer

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