Characteristics of rotating arc for CF4 removal

Kwan Tae Kim; Young Hoon Song; Min Suk Cha; Dae Hoon Lee; Dong Hyun Kim

doi:10.1504/IJEWM.2008.021782

Characteristics of rotating arc for CF₄ removal

Kwan Tae Kim, Young Hoon Song^*, Min Suk Cha, Dae Hoon Lee, Dong Hyun Kim

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Characteristics of CF₄ treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH₄ and O₂ addition is an effective approach for increasing CF₄ removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF₄ removal efficiencies despite supplying O₂ or Ar gases into the process.

Original language	English (US)
Pages (from-to)	412-422
Number of pages	11
Journal	International Journal of Environment and Waste Management
Volume	2
Issue number	4-5
DOIs	https://doi.org/10.1504/IJEWM.2008.021782
State	Published - 2008
Externally published	Yes

Keywords

Electro-chemical
Non-thermal plasma
PFCs
Perfluorocarbons
Rotating arc
Thermo-chemical
Treatment

ASJC Scopus subject areas

Environmental Engineering
Waste Management and Disposal

Access to Document

10.1504/IJEWM.2008.021782

Cite this

@article{a48345927cb4490b8e8c25c3be1df53a,

title = "Characteristics of rotating arc for CF4 removal",

abstract = "Characteristics of CF4 treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH4 and O2 addition is an effective approach for increasing CF4 removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF4 removal efficiencies despite supplying O2 or Ar gases into the process.",

keywords = "Electro-chemical, Non-thermal plasma, PFCs, Perfluorocarbons, Rotating arc, Thermo-chemical, Treatment",

author = "Kim, {Kwan Tae} and Song, {Young Hoon} and Cha, {Min Suk} and Lee, {Dae Hoon} and Kim, {Dong Hyun}",

year = "2008",

doi = "10.1504/IJEWM.2008.021782",

language = "English (US)",

volume = "2",

pages = "412--422",

journal = "International Journal of Environment and Waste Management",

issn = "1478-9876",

publisher = "Inderscience Enterprises Ltd.",

number = "4-5",

}

TY - JOUR

T1 - Characteristics of rotating arc for CF4 removal

AU - Kim, Kwan Tae

AU - Song, Young Hoon

AU - Cha, Min Suk

AU - Lee, Dae Hoon

AU - Kim, Dong Hyun

PY - 2008

Y1 - 2008

N2 - Characteristics of CF4 treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH4 and O2 addition is an effective approach for increasing CF4 removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF4 removal efficiencies despite supplying O2 or Ar gases into the process.

AB - Characteristics of CF4 treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH4 and O2 addition is an effective approach for increasing CF4 removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF4 removal efficiencies despite supplying O2 or Ar gases into the process.

KW - Electro-chemical

KW - Non-thermal plasma

KW - PFCs

KW - Perfluorocarbons

KW - Rotating arc

KW - Thermo-chemical

KW - Treatment

UR - http://www.scopus.com/inward/record.url?scp=64349098047&partnerID=8YFLogxK

U2 - 10.1504/IJEWM.2008.021782

DO - 10.1504/IJEWM.2008.021782

M3 - Article

AN - SCOPUS:64349098047

SN - 1478-9876

VL - 2

SP - 412

EP - 422

JO - International Journal of Environment and Waste Management

JF - International Journal of Environment and Waste Management

IS - 4-5

ER -