Characterization of imprinted gratings based on transparent materials by transmission scatterometry

David Pietroy; Issam Gereige; Cécile Gourgon

doi:10.1016/j.mee.2013.02.052

Characterization of imprinted gratings based on transparent materials by transmission scatterometry

David Pietroy, Issam Gereige, Cécile Gourgon

Physical Sciences and Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.

Original language	English (US)
Pages (from-to)	48-51
Number of pages	4
Journal	Microelectronic Engineering
Volume	106
DOIs	https://doi.org/10.1016/j.mee.2013.02.052
State	Published - Jun 2013

ASJC Scopus subject areas

Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Condensed Matter Physics

Access to Document

10.1016/j.mee.2013.02.052

Cite this

@article{a1c088f171aa44a88446a89ee08f67de,

title = "Characterization of imprinted gratings based on transparent materials by transmission scatterometry",

abstract = "Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. {\textcopyright} 2013 Elsevier B.V. All rights reserved.",

author = "David Pietroy and Issam Gereige and C{\'e}cile Gourgon",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work is supported by the NaPANIL European project.",

year = "2013",

month = jun,

doi = "10.1016/j.mee.2013.02.052",

language = "English (US)",

volume = "106",

pages = "48--51",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Characterization of imprinted gratings based on transparent materials by transmission scatterometry

AU - Pietroy, David

AU - Gereige, Issam

AU - Gourgon, Cécile

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: This work is supported by the NaPANIL European project.

PY - 2013/6

Y1 - 2013/6

N2 - Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.

AB - Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.

UR - http://hdl.handle.net/10754/575696

UR - https://linkinghub.elsevier.com/retrieve/pii/S0167931713001639

UR - http://www.scopus.com/inward/record.url?scp=84875421617&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2013.02.052

DO - 10.1016/j.mee.2013.02.052

M3 - Article

SN - 0167-9317

VL - 106

SP - 48

EP - 51

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Characterization of imprinted gratings based on transparent materials by transmission scatterometry

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this