Characterization of microlenses by digital holographic microscopy

Florian Charrière; Jonas Kühn; Tristan Colomb; Frédéric Montfort; Etienne Cuche; Yves Emery; Kenneth Weible; Pierre Marquet; Christian Depeursinge

doi:10.1364/AO.45.000829

Characterization of microlenses by digital holographic microscopy

Florian Charrière^*, Jonas Kühn, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Kenneth Weible, Pierre Marquet, Christian Depeursinge

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

243 Scopus citations

Abstract

We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.

Original language	English (US)
Pages (from-to)	829-835
Number of pages	7
Journal	Applied Optics
Volume	45
Issue number	5
DOIs	https://doi.org/10.1364/AO.45.000829
State	Published - Feb 10 2006
Externally published	Yes

ASJC Scopus subject areas

Engineering (miscellaneous)
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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abstract = "We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.",

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AU - Charrière, Florian

AU - Kühn, Jonas

AU - Colomb, Tristan

AU - Montfort, Frédéric

AU - Cuche, Etienne

AU - Emery, Yves

AU - Weible, Kenneth

AU - Marquet, Pierre

AU - Depeursinge, Christian

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N2 - We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.

AB - We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.

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Characterization of microlenses by digital holographic microscopy

Abstract

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