Keyphrases
Electrically Actuated
100%
Microbeam
100%
Mechanical Behavior
100%
Polarization Voltage
50%
Natural Frequency
25%
Nonlinear Model
25%
Air Gap
25%
Restoring Force
25%
Resonator
12%
Electrostatic Force
12%
Boundary Value Problem
12%
Result Comparison
12%
Natural Mode
12%
Eigenvalue Problem
12%
Mode Shape
12%
Linear Relationship
12%
Mid-plane Stretching
12%
Stability Limit
12%
Static Deflection
12%
Axial Load
12%
Fundamental Natural Frequency
12%
Gap Capacitor
12%
Engineering
Natural Frequency
100%
Nonlinear Model
66%
Restoring Force
66%
Electrostatics
66%
Experimental Result
33%
Natural Mode
33%
Linear Relationship
33%
Mode Shape
33%
Static Deflection
33%
Boundary Value
33%
Resonator
33%
Eigenvalue
33%
Axial Load
33%
Material Science
Capacitor
100%
Mechanical Property
100%
Resonator
100%