| Original language | English (US) |
|---|---|
| Pages | 261 |
| Number of pages | 1 |
| State | Published - 1982 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Engineering
Chemical Amplification in the Design of Polymers for Resist Application.
C. Grant Willson*, Hiroshi Ito, J. M.J. Frechet
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
7
Scopus
citations