TY - JOUR
T1 - Chemically stabilized epitaxial wurtzite-BN thin film
AU - Vishal, Badri
AU - Singh, Rajendra
AU - Chaturvedi, Abhishek
AU - Sharma, Ankit
AU - Sreedhara, M. B.
AU - Sahu, Rajib
AU - Bhat, Usha
AU - Ramamurty, Upadrasta
AU - Datta, Ranjan
N1 - Funding Information:
The authors at JNCASR sincerely acknowledge ICMS for funding.
Publisher Copyright:
© 2018 Elsevier Ltd
PY - 2018/3
Y1 - 2018/3
N2 - We report on the chemically stabilized epitaxial w-BN thin film grown on c-plane sapphire by pulsed laser deposition under slow kinetic condition. Traces of no other allotropes such as cubic (c) or hexagonal (h) BN phases are present. Sapphire substrate plays a significant role in stabilizing the metastable w-BN from h-BN target under unusual PLD growth condition involving low temperature and pressure and is explained based on density functional theory calculation. The hardness and the elastic modulus of the w-BN film are 37 & 339 GPa, respectively measured by indentation along <0001> direction. The results are extremely promising in advancing the microelectronic and mechanical tooling industry.
AB - We report on the chemically stabilized epitaxial w-BN thin film grown on c-plane sapphire by pulsed laser deposition under slow kinetic condition. Traces of no other allotropes such as cubic (c) or hexagonal (h) BN phases are present. Sapphire substrate plays a significant role in stabilizing the metastable w-BN from h-BN target under unusual PLD growth condition involving low temperature and pressure and is explained based on density functional theory calculation. The hardness and the elastic modulus of the w-BN film are 37 & 339 GPa, respectively measured by indentation along <0001> direction. The results are extremely promising in advancing the microelectronic and mechanical tooling industry.
UR - http://www.scopus.com/inward/record.url?scp=85041541506&partnerID=8YFLogxK
U2 - 10.1016/j.spmi.2018.01.027
DO - 10.1016/j.spmi.2018.01.027
M3 - Article
AN - SCOPUS:85041541506
SN - 0749-6036
VL - 115
SP - 197
EP - 203
JO - Superlattices and Microstructures
JF - Superlattices and Microstructures
ER -