Cleaning's role in high-k/metal gate success

Joel Barnett*, Naim Moumen, Jeff J. Peterson, Muhammad Mustafa Hussain, Seung Chul Song, Gennadi Bersuker

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)45-48
Number of pages4
JournalSemiconductor International
Issue number2
StatePublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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