Cleaning's role in high-k/metal gate success

Joel Barnett^*, Naim Moumen, Jeff J. Peterson, Muhammad Mustafa Hussain, Seung Chul Song, Gennadi Bersuker

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	45-48
Number of pages	4
Journal	Semiconductor International
Volume	29
Issue number	2
State	Published - 2006
Externally published	Yes

ASJC Scopus subject areas

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AU - Barnett, Joel

AU - Moumen, Naim

AU - Peterson, Jeff J.

AU - Hussain, Muhammad Mustafa

AU - Song, Seung Chul

AU - Bersuker, Gennadi

PY - 2006

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