TY - JOUR
T1 - CO2laser-induced bump formation and growth on polystyrene for multi-depth soft lithography molds
AU - Li, Huawei
AU - Fan, Yiqiang
AU - Conchouso Gonzalez, David
AU - Foulds, Ian G.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2012/10/19
Y1 - 2012/10/19
N2 - This paper reports the process of creating bumps on the surface of polystyrene (PS) induced by a CO2laser at low powers. The paper also outlines the procedure for growing bumps induced by multiple laser scans on the aforementioned bumps. These bumps result from the net volume gain of the laser heat-affected zone on the PS rather than from a deposition process, and the expansion of the heat-affected zone on PS was verified by measuring the hardness change using nanoindentation. The bumps have a much smoother surface than microchannels fabricated with laser cutting; depending on the laser power, they have heights ranging from hundreds of nanometers to 42m. The laser scanning speed and scan times along with this technique offer a fast and low-cost alternative for fabricating molds for multi-depth PDMS microfluidic devices. © 2012 IOP Publishing Ltd.
AB - This paper reports the process of creating bumps on the surface of polystyrene (PS) induced by a CO2laser at low powers. The paper also outlines the procedure for growing bumps induced by multiple laser scans on the aforementioned bumps. These bumps result from the net volume gain of the laser heat-affected zone on the PS rather than from a deposition process, and the expansion of the heat-affected zone on PS was verified by measuring the hardness change using nanoindentation. The bumps have a much smoother surface than microchannels fabricated with laser cutting; depending on the laser power, they have heights ranging from hundreds of nanometers to 42m. The laser scanning speed and scan times along with this technique offer a fast and low-cost alternative for fabricating molds for multi-depth PDMS microfluidic devices. © 2012 IOP Publishing Ltd.
UR - http://hdl.handle.net/10754/562369
UR - https://iopscience.iop.org/article/10.1088/0960-1317/22/11/115037
UR - http://www.scopus.com/inward/record.url?scp=84867952392&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/22/11/115037
DO - 10.1088/0960-1317/22/11/115037
M3 - Article
SN - 0960-1317
VL - 22
SP - 115037
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 11
ER -