Comparison of effective work function extraction methods using capacitance and current measurement techniques

Huang Chun Wen; Rino Choi; George A. Brown; Tim Böscke; Kenneth Matthews; Harlan R. Harris; Kisik Choi; Husam N. Alshareef; Hongfa Luan; Gennadi Bersuker; Prashant Majhi; Dim Lee Kwong; Byoung Hun Lee

doi:10.1109/LED.2006.876324

Comparison of effective work function extraction methods using capacitance and current measurement techniques

Huang Chun Wen^*, Rino Choi, George A. Brown, Tim Böscke, Kenneth Matthews, Harlan R. Harris, Kisik Choi, Husam N. Alshareef, Hongfa Luan, Gennadi Bersuker, Prashant Majhi, Dim Lee Kwong, Byoung Hun Lee

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

Original language	English (US)
Pages (from-to)	598-601
Number of pages	4
Journal	IEEE Electron Device Letters
Volume	27
Issue number	7
DOIs	https://doi.org/10.1109/LED.2006.876324
State	Published - Jul 2006
Externally published	Yes

Keywords

Barrier height
High-κ
Metal gate
Work function

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/LED.2006.876324

Cite this

Wen, H. C., Choi, R., Brown, G. A., Böscke, T., Matthews, K., Harris, H. R., Choi, K., Alshareef, H. N., Luan, H., Bersuker, G., Majhi, P., Kwong, D. L., & Lee, B. H. (2006). Comparison of effective work function extraction methods using capacitance and current measurement techniques. IEEE Electron Device Letters, 27(7), 598-601. https://doi.org/10.1109/LED.2006.876324

@article{733901b9526c49a0ba4fe24ae9f1ad99,

title = "Comparison of effective work function extraction methods using capacitance and current measurement techniques",

abstract = "The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.",

keywords = "Barrier height, High-κ, Metal gate, Work function",

author = "Wen, {Huang Chun} and Rino Choi and Brown, {George A.} and Tim B{\"o}scke and Kenneth Matthews and Harris, {Harlan R.} and Kisik Choi and Alshareef, {Husam N.} and Hongfa Luan and Gennadi Bersuker and Prashant Majhi and Kwong, {Dim Lee} and Lee, {Byoung Hun}",

year = "2006",

month = jul,

doi = "10.1109/LED.2006.876324",

language = "English (US)",

volume = "27",

pages = "598--601",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers",

number = "7",

}

TY - JOUR

T1 - Comparison of effective work function extraction methods using capacitance and current measurement techniques

AU - Wen, Huang Chun

AU - Choi, Rino

AU - Brown, George A.

AU - Böscke, Tim

AU - Matthews, Kenneth

AU - Harris, Harlan R.

AU - Choi, Kisik

AU - Alshareef, Husam N.

AU - Luan, Hongfa

AU - Bersuker, Gennadi

AU - Majhi, Prashant

AU - Kwong, Dim Lee

AU - Lee, Byoung Hun

PY - 2006/7

Y1 - 2006/7

N2 - The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

AB - The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

KW - Barrier height

KW - High-κ

KW - Metal gate

KW - Work function

UR - http://www.scopus.com/inward/record.url?scp=33745652739&partnerID=8YFLogxK

U2 - 10.1109/LED.2006.876324

DO - 10.1109/LED.2006.876324

M3 - Article

AN - SCOPUS:33745652739

SN - 0741-3106

VL - 27

SP - 598

EP - 601

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 7

ER -

Comparison of effective work function extraction methods using capacitance and current measurement techniques

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this