Computational Fluid Dynamical Simulation of GaN Metal-Organic Vapor Phase Epitaxial Growth

Kazuhiro Ohkawa, Kota Tokuda, Akira Hirako

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	520-524
Number of pages	5
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	49
Issue number	9
DOIs	https://doi.org/10.3131/jvsj.49.520
State	Published - Jan 2006
Externally published	Yes

ASJC Scopus subject areas

@article{c8496d5157084cd79d627e59d01e86c9,

title = "Computational Fluid Dynamical Simulation of GaN Metal-Organic Vapor Phase Epitaxial Growth",

author = "Kazuhiro Ohkawa and Kota Tokuda and Akira Hirako",

year = "2006",

month = jan,

doi = "10.3131/jvsj.49.520",

language = "English (US)",

volume = "49",

pages = "520--524",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

publisher = "Vacuum Society of Japan",

number = "9",

}

TY - JOUR

T1 - Computational Fluid Dynamical Simulation of GaN Metal-Organic Vapor Phase Epitaxial Growth

AU - Ohkawa, Kazuhiro

AU - Tokuda, Kota

AU - Hirako, Akira

PY - 2006/1

Y1 - 2006/1

UR - http://www.scopus.com/inward/record.url?scp=85023863967&partnerID=8YFLogxK

U2 - 10.3131/jvsj.49.520

DO - 10.3131/jvsj.49.520

M3 - Article

AN - SCOPUS:85023863967

SN - 0559-8516

VL - 49

SP - 520

EP - 524

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

IS - 9

ER -