Controlling dynamic pull-in escape in electrostatic MEMS

Keyphrases

• Dynamic Pull-in 100%
• MEMS Devices 100%
• Electrostatic MEMS 100%
• Control Signal 100%
• Electrical Harmonics 50%
• Floquet Theory 50%
• Numerical Scheme 50%
• Capacitive MEMS 50%
• Phase Shift 50%
• Periodic Motion 50%
• Shooting Method 50%
• Primary Resonance 50%
• DC Voltage 50%
• MEMS Resonator 50%
• Harmonic Voltage 50%
• AC Signal 50%
• Phase Control 50%
• Device Behavior 50%
• Potential Well 50%
• AC Excitation 50%
• Tongue 50%
• Capacitive Devices 50%

Engineering

• Capacitive 100%
• Electrostatics 100%
• Control Signal 100%
• Simulation Result 50%
• Periodic Motion 50%
• Numerical Scheme 50%
• Primary Resonance 50%
• Harmonic Voltage 50%
• Device Behavior 50%
• Resonator 50%
• Phase Shift 50%
• Phase Control 50%

Material Science

• Resonator 100%