Copper thin film of alternating textures

Hanchen Huang; H. L. Wei; C. H. Woo; X. X. Zhang

doi:10.1063/1.1583866

Copper thin film of alternating textures

Hanchen Huang^*, H. L. Wei, C. H. Woo, X. X. Zhang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

A study was performed on copper thin film of alternating textures. Copper films were deposited on a SiO₂/Si(111) substrate using dc magnetron sputtering technique. A model of texture evolution during the formation of multilayers was proposed based on anisotropic elastic analysis and molecular dynamics simulations.

Original language	English (US)
Pages (from-to)	4265-4267
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	24
DOIs	https://doi.org/10.1063/1.1583866
State	Published - Jun 16 2003
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{a9c05537b018422581881c53e7780fbf,

title = "Copper thin film of alternating textures",

abstract = "A study was performed on copper thin film of alternating textures. Copper films were deposited on a SiO2/Si(111) substrate using dc magnetron sputtering technique. A model of texture evolution during the formation of multilayers was proposed based on anisotropic elastic analysis and molecular dynamics simulations.",

author = "Hanchen Huang and Wei, {H. L.} and Woo, {C. H.} and Zhang, {X. X.}",

year = "2003",

month = jun,

day = "16",

doi = "10.1063/1.1583866",

language = "English (US)",

volume = "82",

pages = "4265--4267",

journal = "Applied Physics Letters",

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T1 - Copper thin film of alternating textures

AU - Huang, Hanchen

AU - Wei, H. L.

AU - Woo, C. H.

AU - Zhang, X. X.

PY - 2003/6/16

Y1 - 2003/6/16

N2 - A study was performed on copper thin film of alternating textures. Copper films were deposited on a SiO2/Si(111) substrate using dc magnetron sputtering technique. A model of texture evolution during the formation of multilayers was proposed based on anisotropic elastic analysis and molecular dynamics simulations.

AB - A study was performed on copper thin film of alternating textures. Copper films were deposited on a SiO2/Si(111) substrate using dc magnetron sputtering technique. A model of texture evolution during the formation of multilayers was proposed based on anisotropic elastic analysis and molecular dynamics simulations.

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U2 - 10.1063/1.1583866

DO - 10.1063/1.1583866

M3 - Article

AN - SCOPUS:0038110855

SN - 0003-6951

VL - 82

SP - 4265

EP - 4267

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

ER -

Copper thin film of alternating textures

Abstract

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