TY - GEN
T1 - Core-shell magnetic nanoparticles for on-chip RF inductors
AU - Koh, Kisik
AU - Park, Jeaneun
AU - Park, Jungwon
AU - Zhu, Xu
AU - Lin, Liwei
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported in part by an Academic Excellence Alliance grant awarded by the KAUST (King Abdullah University of Science and Technology) Office of Competitive Research Fund, the DARPA N/MEMS program and a SRC (Semiconductor Research Corporation) grant. The authors would like to thank Dr. Kevin O'Brien, Jun-Chau Chien and Chia Meng Chen for valuable discussions.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.
PY - 2013/1
Y1 - 2013/1
N2 - FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.
AB - FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.
UR - http://hdl.handle.net/10754/597883
UR - http://ieeexplore.ieee.org/document/6474279/
UR - http://www.scopus.com/inward/record.url?scp=84875428353&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474279
DO - 10.1109/MEMSYS.2013.6474279
M3 - Conference contribution
SN - 9781467356558
SP - 465
EP - 468
BT - 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -