TY - GEN
T1 - Creep of parylene-C film
AU - Lin, Jeffrey Chun-Hui
AU - Deng, Peigang
AU - Lam, Gilbert
AU - Lu, Bo
AU - Lee, Yi-Kuen
AU - Tai, Yu-Chong
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledged KAUST grant number(s): SA-C0040/UK-C0016
Acknowledgements: This work is supported by Biomimetic MicroElectronic Systems (BMES) and partially supported by KAUST Award No. SA-C0040/UK-C0016. The authors would like to thank Trevor Roper's help in terms of sample preparation, machines' maintenance, and instrument's installation.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.
PY - 2011/6
Y1 - 2011/6
N2 - The glass transition temperature of as-deposited parylene-C is first measured to be 50°C with a ramping-temperature-dependent modulus experiment. The creep behavior of parylene-C film in the primary and secondary creep region is then investigated below and above this glass transition temperature using a dynamic mechanical analysis (DMA) machine Q800 from TA instruments at 8 different temperatures: 10, 25, 40, 60, 80, 100, 120 and 150°C. The Burger's model, which is the combined Maxwell model and Kelvin-Voigt model, fits well with our primary and secondary creep data. Accordingly, the results show that there's little or no creep below the glass transition temperature. Above the glass transition temperature, the primary creep and creep rate increases with the temperature, with a retardation time constant around 6 minutes. © 2011 IEEE.
AB - The glass transition temperature of as-deposited parylene-C is first measured to be 50°C with a ramping-temperature-dependent modulus experiment. The creep behavior of parylene-C film in the primary and secondary creep region is then investigated below and above this glass transition temperature using a dynamic mechanical analysis (DMA) machine Q800 from TA instruments at 8 different temperatures: 10, 25, 40, 60, 80, 100, 120 and 150°C. The Burger's model, which is the combined Maxwell model and Kelvin-Voigt model, fits well with our primary and secondary creep data. Accordingly, the results show that there's little or no creep below the glass transition temperature. Above the glass transition temperature, the primary creep and creep rate increases with the temperature, with a retardation time constant around 6 minutes. © 2011 IEEE.
UR - http://hdl.handle.net/10754/597893
UR - http://ieeexplore.ieee.org/document/5969483/
UR - http://www.scopus.com/inward/record.url?scp=80052117952&partnerID=8YFLogxK
U2 - 10.1109/transducers.2011.5969483
DO - 10.1109/transducers.2011.5969483
M3 - Conference contribution
SN - 9781457701573
SP - 2698
EP - 2701
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -