Critical ultra low-k TDDB reliability issues for advanced CMOS technologies

F. Chen*, M. Shinosky, B. Li, J. Gambino, S. Mongeon, P. Pokrinchak, J. Aitken, D. Badami, M. Angyal, R. Achanta, G. Bonilla, G. Yang, P. Liu, K. Li, J. Sudijono, Y. Tan, T. J. Tang, C. Child

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

23 Scopus citations

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