D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Zhiyuan Shen, Jingyu Lu, Cheewee Tan, Jianmin Miao, Zhihong Wang

Research output: Contribution to journalArticlepeer-review

22 Scopus citations


This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.
Original languageEnglish (US)
Pages (from-to)93-99
Number of pages7
JournalSensors and Actuators, A: Physical
StatePublished - Jan 2013

ASJC Scopus subject areas

  • Instrumentation
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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