Design and Demonstration of Micro-Electromechanical Resonator-Based Multipliers

Xuecui Zou, Sally Ahmed, Hossein Fariborzi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


In this work, a novel design strategy and experimental results of a micro-electro-mechanical system (MEMS) resonator-based 7:3 compressor, the core building block of digital multipliers, are presented. The compressor consists of three identical clamped-clamped beam resonators and an auxiliary complementary-metal-oxide-semi-conductor (CMOS) summing amplifier. The compressor is designed such that the seven input bits tune the resonance frequencies of the resonators using the electrostatic softening effect. Each resonator is driven by four different frequencies to generate one of the output bits. Experimental results are obtained to verify the compressor operation. The overall design complexity and interconnect overhead of the proposed compressor, even considering the amplifier, is significantly reduced compared to the CMOS-only compressors which require more than 100 transistors on average. The energy consumption of the resonators used in the design is around 59.01 pJ/Op with a sampling rate of 80 S/s. We show that by scaling and optimizing the device dimension, lower energy, and kS/s sampling rate are attainable.
Original languageEnglish (US)
Title of host publication2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Number of pages4
ISBN (Print)9781665419123
StatePublished - Jan 25 2021


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