Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

E. Di Fabrizio; D. Cojoc; L. Businaro; S. Cabrini; F. Romanato; L. Vaccari; M. Altissimo

doi:10.1016/S0167-9317(02)00426-4

Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

E. Di Fabrizio, D. Cojoc, L. Businaro, S. Cabrini, F. Romanato, L. Vaccari, M. Altissimo

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots.

Original language	English (US)
Pages (from-to)	963-969
Number of pages	7
Journal	Microelectronic Engineering
Volume	61-62
DOIs	https://doi.org/10.1016/S0167-9317(02)00426-4
State	Published - Jul 2002
Externally published	Yes

Keywords

2D and 3D optical tweezer arrays
Genetic algorithms
Phase retrieval iterative algorithms

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/S0167-9317(02)00426-4

Cite this

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title = "Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography",

abstract = "Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots.",

keywords = "2D and 3D optical tweezer arrays, Genetic algorithms, Phase retrieval iterative algorithms",

author = "{Di Fabrizio}, E. and D. Cojoc and L. Businaro and S. Cabrini and F. Romanato and L. Vaccari and M. Altissimo",

year = "2002",

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doi = "10.1016/S0167-9317(02)00426-4",

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T1 - Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

AU - Di Fabrizio, E.

AU - Cojoc, D.

AU - Businaro, L.

AU - Cabrini, S.

AU - Romanato, F.

AU - Vaccari, L.

AU - Altissimo, M.

PY - 2002/7

Y1 - 2002/7

N2 - Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots.

AB - Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots.

KW - 2D and 3D optical tweezer arrays

KW - Genetic algorithms

KW - Phase retrieval iterative algorithms

UR - http://www.scopus.com/inward/record.url?scp=17344393004&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(02)00426-4

DO - 10.1016/S0167-9317(02)00426-4

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SN - 0167-9317

VL - 61-62

SP - 963

EP - 969

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

Abstract

Keywords

ASJC Scopus subject areas

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