TY - JOUR
T1 - Design and finite element method analysis of laterally actuated multi-value nano electromechanical switches
AU - Kloub, Hussam
AU - Smith, Casey
AU - Hussain, Muhammad Mustafa
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2011/9/20
Y1 - 2011/9/20
N2 - We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink. © 2011 The Japan Society of Applied Physics.
AB - We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink. © 2011 The Japan Society of Applied Physics.
UR - http://hdl.handle.net/10754/561864
UR - https://iopscience.iop.org/article/10.1143/JJAP.50.094301
UR - http://www.scopus.com/inward/record.url?scp=80053020876&partnerID=8YFLogxK
U2 - 10.1143/JJAP.50.094301
DO - 10.1143/JJAP.50.094301
M3 - Article
SN - 0021-4922
VL - 50
SP - 094301
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 9
ER -