Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction

L. Vaccari; M. Altissimo; E. Di Fabrizio; F. De Grandis; G. Manzoni; F. Santoni; F. Graziani; A. Gerardino; F. Perennes; P. Miotti

doi:10.1116/1.1523015

Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction

L. Vaccari^*, M. Altissimo, E. Di Fabrizio, F. De Grandis, G. Manzoni, F. Santoni, F. Graziani, A. Gerardino, F. Perennes, P. Miotti

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

The feasibility of a miniaturized ACS was demonstrated by using advanced microfabrication techniques. In particular, it was shown that silicon dry etching conditions can be adjusted in order to get surfaces with a roughness of 100 nm or less.

Original language	English (US)
Pages (from-to)	2793-2797
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1523015
State	Published - Nov 2002
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Vaccari, L., Altissimo, M., Di Fabrizio, E., De Grandis, F., Manzoni, G., Santoni, F., Graziani, F., Gerardino, A., Perennes, F., & Miotti, P. (2002). Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 20(6), 2793-2797. https://doi.org/10.1116/1.1523015

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title = "Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction",

abstract = "The feasibility of a miniaturized ACS was demonstrated by using advanced microfabrication techniques. In particular, it was shown that silicon dry etching conditions can be adjusted in order to get surfaces with a roughness of 100 nm or less.",

author = "L. Vaccari and M. Altissimo and {Di Fabrizio}, E. and {De Grandis}, F. and G. Manzoni and F. Santoni and F. Graziani and A. Gerardino and F. Perennes and P. Miotti",

year = "2002",

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doi = "10.1116/1.1523015",

language = "English (US)",

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pages = "2793--2797",

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Vaccari, L, Altissimo, M, Di Fabrizio, E, De Grandis, F, Manzoni, G, Santoni, F, Graziani, F, Gerardino, A, Perennes, F & Miotti, P 2002, 'Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 20, no. 6, pp. 2793-2797. https://doi.org/10.1116/1.1523015

TY - JOUR

T1 - Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction

AU - Vaccari, L.

AU - Altissimo, M.

AU - Di Fabrizio, E.

AU - De Grandis, F.

AU - Manzoni, G.

AU - Santoni, F.

AU - Graziani, F.

AU - Gerardino, A.

AU - Perennes, F.

AU - Miotti, P.

PY - 2002/11

Y1 - 2002/11

N2 - The feasibility of a miniaturized ACS was demonstrated by using advanced microfabrication techniques. In particular, it was shown that silicon dry etching conditions can be adjusted in order to get surfaces with a roughness of 100 nm or less.

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U2 - 10.1116/1.1523015

DO - 10.1116/1.1523015

M3 - Article

AN - SCOPUS:0036883165

SN - 0734-211X

VL - 20

SP - 2793

EP - 2797

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction

Abstract

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