Design, fabrication, and evaluation of on-chip micro-supercapacitors

Majid Beidaghi*, Wei Chen, Chunlei Wang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations


Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

Original languageEnglish (US)
Title of host publicationEnergy Harvesting and Storage
Subtitle of host publicationMaterials, Devices, and Applications II
StatePublished - 2011
EventEnergy Harvesting and Storage: Materials, Devices, and Applications II - Orlando, FL, United States
Duration: Apr 25 2011Apr 28 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherEnergy Harvesting and Storage: Materials, Devices, and Applications II
Country/TerritoryUnited States
CityOrlando, FL


  • Carbon-microelectomechanical systems (C-MEMS)
  • Micro-supercapacitor
  • On-chip micro-power

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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